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The Chinese government says domestic companies have developed litho tools capable of 65nm and 110nm resolution.

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Technology ministry claims ‘significant technological breakthroughs’ in deep-ultraviolet lithography by unnamed companies.

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The Chinese government says domestic companies have developed litho tools capable of 65nm and 110nm resolution.

The recent unveiling of a new local deep ultraviolet (DUV) lithography machine model by China's Ministry of Industry and ...